APPLICATION OF DOUBLE-CRYSTAL X-RAY DIFRACTOMETRY METHODS AND TOPOGRAPHY FOR CHARACTERIZATION OF ISOTOPICALLY MODIFIED CVD DIAMOND FILMS

Authors

  • D. Romanov Russia, Kaluga, Bauman Moscow State Technical University Kaluga Branch
  • V. Kosushkin Russia, Kaluga, Bauman Moscow State Technical University Kaluga Branch
  • V. Strelov Shubnikov Institute of Crystallography, Federal Scientific Research Centre «Crystallography and Photonics», Russian Academy of Sciences

Keywords:

Double-crystal x-ray diffractometry, x-ray topography, defects in the crystal structure, epitaxial films, isotopically modified films

Abstract

The case of studying isotopically modified CVD diamond films the high efficiency of using of double-crystal x-ray diffractometry and topography methods for characterizing crystals while improving the technology for their growth has been demonstrated. The main structural defects (dislocations, stacking faults, second-phase inclusions, etc.) that occur in synthetic diamond crystals during their preparation have been identified.

References

Wandersande J.W. In: Properties and Growth of 3. I.A. Prokhorov, A.E. Voloshin, D.A. Romanov, Diamond. L.: The Inst. Electric. Eng. 1994. P. 33 et al., Crystallogr. Rep. 64 (3), 369.

V.G. Ral’chenko and A.P. Bol’shakov, Carbon 4. I.A. Prokhorov, A.E. Voloshin, V.G. Photonics, Ed. by V.I. Konov (Nauka, Moscow, 2017) Ral’chenko, et al., Crystallogr. Rep. 61 (6), 945. [in Russian], p. 9. 5. Yurov V., Bushuev E. Bolshakov A., et al. // Phys. Status Solidi A 2017, 00, 1700177.

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Published

2020-12-11

Issue

Vol. 1 No. 43 (2020)

Section

Статьи

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